Boron nitride in PVD systems

In physical vapor deposition (PVD) systems, insulators and the interior of the system must withstand extreme operating conditions, such as extreme electrical and thermal stresses. Boron nitride insulators stabilize the arc on the target and protect the system components from uncontrolled discharges.

During long coating cycles, boron nitride prevents stubborn deposits of coating materials from forming on insulation frames—such as rings and strips—as well as on internal components within the system. Nevertheless, regular mechanical cleaning, typically performed via abrasive sandblasting, cannot always be avoided. By selecting boron nitride with higher mechanical strength, material wear and micro-erosion can be reduced compared to conventional variants, thereby avoiding increased maintenance costs.

Typical applications:

  • Shielding frames, strips, and rings
  • Release agents for carousels and other peripheral equipment

Our Boron Nitride Recommendations

An Overview of the Benefits of HeBoSint® Shielding

  • Consistent, stable arc guidance on the target
  • Protecting plant equipment from ARC strikes
  • Resistance of boron nitride shields to abrasive cleaning
  • Lower maintenance and replacement part costs
  • Reduction of process interruptions
  • High temperature stability even during long cycles
  • Optimierter Wirtschaftlichkeit pro Beschichtungszyklus

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    Andreas Rettinger

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    Email info@henze-bnp.de

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    Erwin Eurich

    Technical Sales

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